CE-20PA1012X - OASiS 12: Environmental Control in the Semiconductor Industry
This course, Environmental Control in the Semiconductor Industry, provides an understanding of the environmental systems that support semiconductor manufacturing. Learners gain foundational knowledge of key processes, beginning with an overview of the semiconductor manufacturing industry and the critical role of ultrapure water (UPW). The course explains what UPW is, why it's essential, where it's used in fabrication, and how it’s produced using technologies such as UV/advanced oxidation, reverse osmosis, and ion exchange.
Building on this foundation, the course explores wastewater treatment and recycling systems used to manage and recover chemicals like hydrofluoric acid, sulfuric acid, TMAH, and NMP. Learners then examine air pollution control technologies, including gas-phase emissions and treatment solutions such as scrubbing and incineration.
Learners will develop a solid foundation in the systems that support sustainable and compliant chip manufacturing.
Course Outline
This course focuses on the following modules:
- Background of Semiconductor Manufacturing
- Ultrapure Water Production
- Wastewater Treatment and Recycling
- Air Pollution Control Technologies
Learner Outcomes
By the end of this course, learners will be able to:
- Describe the semiconductor manufacturing process and its environmental impacts.
- Explain the production and role of ultrapure water in semiconductor fabrication.
- Evaluate wastewater treatment and chemical recovery methods used in fabrication.
- Analyze technologies for controlling air emissions from semiconductor processes.
- Integrate environmental control strategies into sustainable and compliant facility operations.
Who Should Register?
This course is ideal for learners interested in semiconductor manufacturing, materials, devices, and circuits. A foundational knowledge of physics and chemistry at a high school level is helpful but not required. No prior knowledge on CMOS or other semiconductor technology is required.
Select a section to register
OASiS
The Ohio-Southwest Alliance on Semiconductors and Integrated Scalable Manufacturing (OASiS) team was established in 2022 with the support of Intel. The goal of OASiS is to provide individuals with strong STEM backgrounds with the very fundamental skills required to pursue semiconductor careers. Altogether, OASiS has engaged 15 universities, colleges, community colleges, and regional campuses in southwest Ohio.
To date, over 1000 students with backgrounds in electrical and computer engineering, computer science, chemical engineering, mechanical and material engineering, physics, and chemistry have successfully gone through the program. The ultimate goal of the OASiS team is to be able to provide semiconductor workforce development opportunities by delivering modules to students interested in the area of semiconductor manufacturing, materials, devices and circuits so they can be part of the needed 100,000+ workforce needed in the field by 2030.
The College of Engineering and Applied Sciences (CEAS)
The College of Engineering and Applied Science is organized into eight departments. Each offers multiple degrees, both graduate and undergraduate, and provides students with rich experience in the classroom, in the lab and on the job.
- Aerospace Engineering & Engineering Mechanics
- Biomedical Engineering
- Chemical and Environmental Engineering
- Civil and Architectural Engineering and Construction Management
- Computer Science
- Electrical and Computer Engineering
- Engineering and Computing Education
With real-world experiences at firms and research centers across the country and around the world, our students graduate with skills and confidence to turn ideas into reality, solving tomorrow’s problems today and seeking out new challenges.