CE-20PA1016X - OASiS 16: Air Emissions from Semiconductor Processes
This course explores various emissions from semiconductor processes and their associated health and environmental impacts. Air emissions are examined in the context of these processes, along with associated air quality-related rules such as the CAA (Clean Air Act), NAAQS (National Ambient Air Quality Standards), NESHAP (National Emission Standards of Hazardous Air Pollutants), TRI (Toxic Release Inventory), and GHG (Greenhouse Gases) reporting. To increase understanding, learners are guided through an overview of Intel Ohio’s air permit. Learners gain insight into key emissions from semiconductor operations, their impacts, and where to find relevant information. Building on this foundation, learners are enabled to further explore and deepen their understanding of the health and environmental impacts of semiconductor emissions, tailored to their own learning needs.
Course Outline
This course focuses on the following modules:
Part 1: Air Pollutants Under NESHAP
Part 2: Air Pollutants Under TRI
Part 3: GHGs in the Semiconductor Process
Part 4: Air Permits
Learner Outcomes
By the end of this course, learners will be able to:
- Describe the major air pollutants regulated under NESHAP, including their generation and use in the semiconductor process, associated health and environmental impacts, and applicable regulatory limits.
- Identify the air pollutants regulated under the Toxic Release Inventory (TRI) reporting, including their generation and use in the semiconductor process, and explain the health and environmental impacts.
- Explain greenhouse gases regulated under GHG reporting, describe their generation and use in semiconductor processes, and analyze the environmental impacts.
- Describe the air pollutants from supporting systems that are regulated under an air permit.
Who Should Register?
This course is ideal for learners interested in semiconductor manufacturing, materials, devices, and circuits. A foundational knowledge of physics and chemistry at a high school level is helpful but not required. No prior knowledge on CMOS or other semiconductor technology is required.
Select a section to register
OASiS
The Ohio-Southwest Alliance on Semiconductors and Integrated Scalable Manufacturing (OASiS) team was established in 2022 with the support of Intel. The goal of OASiS is to provide individuals with strong STEM backgrounds with the very fundamental skills required to pursue semiconductor careers. Altogether, OASiS has engaged 15 universities, colleges, community colleges, and regional campuses in southwest Ohio.
To date, over 1000 students with backgrounds in electrical and computer engineering, computer science, chemical engineering, mechanical and material engineering, physics, and chemistry have successfully gone through the program. The ultimate goal of the OASiS team is to be able to provide semiconductor workforce development opportunities by delivering modules to students interested in the area of semiconductor manufacturing, materials, devices and circuits so they can be part of the needed 100,000+ workforce needed in the field by 2030.
The College of Engineering and Applied Sciences (CEAS)
The College of Engineering and Applied Science is organized into eight departments. Each offers multiple degrees, both graduate and undergraduate, and provides students with rich experience in the classroom, in the lab and on the job.
- Aerospace Engineering & Engineering Mechanics
- Biomedical Engineering
- Chemical and Environmental Engineering
- Civil and Architectural Engineering and Construction Management
- Computer Science
- Electrical and Computer Engineering
- Engineering and Computing Education
With real-world experiences at firms and research centers across the country and around the world, our students graduate with skills and confidence to turn ideas into reality, solving tomorrow’s problems today and seeking out new challenges.