CE-20PA1003X - OASiS 03: Introduction to Integrated Circuits Fabrication Processes and Metrology
This course, Introduction to Integrated Circuits Fabrication Processes and Metrology, is part of the OASiS Foundations Program.
These days microprocessors and integrated circuits (ICs) can have billions of tiny transistors that serve as unit cells for computing or data storage. This course will introduce learners to the basics of the semiconductor manufacturing process, tools, and how different processes are sequenced together to create useful electronic functions.
To earn the OASiS Foundations program micro-credential, learners must complete the following steps:
- Complete the following courses with associated quizzes
- OASiS 01: Introduction to the Semiconductor Processing Environment - Cleanroom and Safety Protocols
- OASiS 02: Chemical Safety in Semiconductor Processing
- OASiS 03: Introduction to Integrated Circuits (IC) Fabrication Processes and Metrology
- OASiS 04: Introduction to Semiconductor Manufacturing and Equipment Safety
- OASiS 05: Professional Skills
- Final Requirement: The OASiS Foundations Program micro-credential requires all learners to complete ONE of the following three cleanroom experience options. Learners may register for a cleanroom experience anytime after completing the OASiS 01 course.
- Option 1: OASiS 0A: Cleanroom Facility Experience
- Option 2: OASiS 0B: AV/VR Cleanroom Simulation
- Option 3: OASiS 06: Vacuum and Gas Handling

Course Outline
This course focuses on the following modules:
- Part 1: Overview of the CMOS Process Flow
- Part 2: Gate Dielectrics
- Part 3: Mask Design, Patterning and Lithography
- Part 4: Plasma Etching
- Part 5: Doping
- Part 6: Thin Film Metallization
- Part 7: Metrology and Packaging
Learner Outcomes
By the end of this course, learners will be able to:
- Explain critical manufacturing steps involved in IC fabrication.
- Identify tools used in IC manufacturing processes.
- Explain the relationship between circuit design, mask design, and process design.
- Define ion implant, chemical mechanical polish, and inline process control.
- Define gate dielectric.
Who Should Register?
This course is ideal for learners interested in semiconductor manufacturing, materials, devices, and circuits. A foundational knowledge of physics and chemistry at a high school level is helpful but not required. No prior knowledge on CMOS or other semiconductor technology is required.
What You'll Earn
After completing all program requirements, learners earn the OASiS Foundations micro-credential.

View the OASiS Foundations Badge
Learn more about UC Skills credentials on our credentials page.
Applies to the Following Program
- OASiS Foundations Program : OASiS Program
